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Implicit neural network-based coal SEM super-resolution for enhancing micro-pores measurement tasks.

Xiaowei An1, Shenghua Teng2, Zhuopeng Wang2

  • 1College of Electrical Engineering and Automation, Shandong University of Science and Technology, Qingdao, 266510, Shandong, China.

Neural Networks : the Official Journal of the International Neural Network Society
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Summary

This study introduces a new super-resolution (SR) framework using implicit neural representation and Half-Quadratic Splitting optimization to reduce radiation damage in Scanning Electron Microscopy (SEM). The method enhances image quality and ensures stability for precise measurements.

Keywords:
Coal micro-pores measurementImplicit neural representationInteractive-interpretableSuper resolution

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Area of Science:

  • Materials Science
  • Microscopy
  • Computational Imaging

Background:

  • Scanning Electron Microscopy (SEM) requires high resolution for detailed analysis.
  • Prolonged radiation exposure during SEM can cause structural damage to specimens.
  • Existing super-resolution (SR) methods may not adequately address radiation-induced artifacts or ensure measurement stability.

Purpose of the Study:

  • To develop an interactive-interpretable super-resolution (SR) framework to mitigate radiation damage in SEM.
  • To improve visual fidelity and geometric accuracy of high-resolution SEM images.
  • To provide a stable and applicable solution for geometry-sensitive measurement tasks.

Main Methods:

  • Integration of implicit neural representation (INR) with model-driven Half-Quadratic Splitting (HQS) optimization.
  • Utilizing a local window attention mechanism within INR for contextual dependencies.
  • Employing an interactive dual-branch network to decouple feature content and positional encoding.
  • Unfolding the HQS algorithm into a deep, interpretable network for transparent optimization steps.

Main Results:

  • The proposed SR framework significantly outperforms state-of-the-art SR algorithms in visual fidelity.
  • Demonstrated applicability and stability in downstream geometry-sensitive measurement tasks.
  • The method effectively addresses structural damage risks associated with prolonged radiation exposure in SEM.

Conclusions:

  • The interactive-interpretable SR framework offers a robust solution for high-resolution SEM imaging under radiation.
  • The integration of INR and HQS optimization enhances image quality while preserving geometric integrity.
  • This approach is valuable for applications requiring precise measurements from radiation-exposed specimens.