Emerging Vapor-Phase Growth Methods for Halide Perovskite Thin Films and Nanostructures

Metal halide perovskites (MHPs) have emerged as a class of highly efficient semiconductor materials, attracting widespread interest for their potential applications in photovoltaics, light-emitting diodes, photodetectors, and transistors. Vapor-phase techniques for perovskite synthesis represent a paradigm shift in materials processing, offering precise control over morphology, crystallinity, and composition, while enabling industry-scale manufacturing. This review highlights advancements in vapor-phase synthesis of MHP thin films and micro- and nanostructures, emphasizing strategies to enhance electronic and optical properties, with structural control for next-generation device integration. We introducethe fundamental principles of widely used vapor-phase growth methods and discuss key process modifications employed to control chemical composition, crystal dimension, anisotropic growth, doping, phase purity, and substrate compatibility. We also summarize notable device performance, underscoring the transformative potential of vapor-phase approaches for scalable and high-performance optoelectronic technologies with MHPs.