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Defect Engineering of HfO2-Based Thin Films for Simultaneously Achieving High Polarization and Excellent Fatigue

Mingsheng Ma1, Yunpeng Li1, Tao Yu2

  • 1School of Advanced Materials and Nanotechnology, Xidian University, Xi'an 710126, China.

Nano Letters
|January 21, 2026
PubMed

Keywords:
HfO2-based ferroelectricsTi dopantdefect engineeringfatiguefirst-principles calculations

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