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Updated: Jan 29, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
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Auger Electron Spectroscopy for Chemical Analysis of Passivated (Al,Ga)N-Based Systems

Alina Domanowska1, Bogusława Adamowicz1

  • 1Institute of Physics-CSE, Silesian University of Technology, S. Konarskiego 22B, 44-100 Gliwice, Poland.

Micromachines
|January 28, 2026
PubMed

Keywords:
Auger electron spectroscopycharacterizationdepth profilingdielectric/semiconductor interfacegallium nitridepassivation

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