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Related Experiment Video

Updated: Jan 29, 2026

Author Spotlight: A Machine-Vision Approach to Transmission Electron Microscopy Workflows, Results Analysis and Data Management
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Design and Vision-Based Calibration of a Five-Axis Precision Dispensing Machine.

Ruizhou Wang1, Jinyu Liao1, Binghao Wang1

  • 1State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, China.

Micromachines
|January 28, 2026
PubMed
Summary
This summary is machine-generated.

This study introduces a vision-based measurement (VBM) system to identify geometric errors in five-axis precision dispensing machines. The system enables automated calibration, improving semiconductor packaging accuracy.

Keywords:
five-axis dispensing machinegeometric error identificationkinematics calibrationvision-based measurement (VBM)

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Area of Science:

  • Mechanical Engineering
  • Robotics
  • Metrology

Background:

  • Five-axis precision dispensing machines are crucial for semiconductor packaging.
  • Geometric errors in these machines significantly impact dispensing accuracy.
  • Existing calibration methods can be complex and time-consuming.

Purpose of the Study:

  • To propose a vision-based measurement (VBM) system for identifying and calibrating geometric errors in five-axis dispensing machines.
  • To develop an automated solution for kinematic calibration and workpiece detection.
  • To enhance the overall accuracy and reliability of semiconductor packaging processes.

Main Methods:

  • Established a kinematic model using screw theory's product-of-exponential formulation.
  • Designed a geometric error identification algorithm incorporating position-independent geometric errors (PIGEs) and position-dependent geometric errors (PDGEs).
  • Employed singular value decomposition and regularization to solve overdetermined equations and identify PIGEs in the A and C axes.

Main Results:

  • The VBM system successfully identified eight PIGEs in the A and C axes.
  • Measured mean spatial position error of 59.9 μm and mean orientation error of 160 arcsec for the end-effector.
  • Verified the proposed approach through comprehensive error measurements.

Conclusions:

  • The VBM system offers a feasible and automated calibration solution for five-axis precision dispensing machines.
  • The developed method effectively quantifies geometric errors, crucial for high-precision applications.
  • This approach contributes to improved accuracy in semiconductor packaging.