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We developed a novel MEMS electromagnetic actuator for optical interconnects. It achieves large stroke and high stability by integrating a Differential Motion Rejection unit, significantly reducing parasitic motion and crosstalk.

Keywords:
Differential Motion RejectionMEMS actuatorfolded beammodule-level optical interconnectout-of-plane stiffness

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Optical Engineering
  • Actuator Technology

Background:

  • Module-level free-space optical interconnects necessitate actuators with both large stroke and high stability.
  • Traditional folded-beam actuators face a trade-off between stroke and stability.
  • Parasitic motion and crosstalk are critical challenges in actuator design for optical systems.

Purpose of the Study:

  • To develop a millimeter-scale MEMS electromagnetic actuator that overcomes the stroke-stability trade-off.
  • To integrate a Differential Motion Rejection (DMR) unit with a rigid frame for enhanced actuator performance.
  • To systematically evaluate the actuator's performance through modeling, simulation, and experimental validation.

Main Methods:

  • Magnetic-structural coupling modeling to understand electromagnetic-mechanical interactions.
  • Finite element simulation to predict mechanical behavior and optimize design.
  • Experimental characterization of stroke, resonant frequency, out-of-plane displacement, stiffness, and crosstalk.
  • Optical testing to assess stable deflection angles for practical application.

Main Results:

  • Achieved millimeter-scale stroke under sinusoidal drive with a primary resonant frequency of approximately 31 Hz.
  • Reduced out-of-plane displacement at resonance by approximately 97% using the DMR and frame.
  • Increased static Z-direction stiffness by over 50 times and decreased displacement crosstalk to 0.265%.
  • Demonstrated a stable deflection angle of approximately ±21° through optical testing.

Conclusions:

  • The developed MEMS electromagnetic actuator successfully combines large stroke with high stability.
  • The integration of the DMR unit and rigid frame effectively suppresses parasitic motion and crosstalk.
  • This actuator design is well-suited for module-level optical interconnect systems with demanding space and stability requirements.