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Updated: Jan 29, 2026

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Ruthenium(II) carbonyl amidates - a new class of precursors for atomic layer deposition

Jorit Obenlüneschloß1, Cara-Lena Nies2, Michael Gock3

  • 1Inorganic Materials Chemistry, Ruhr University Bochum, Bochum, 44801 Germany. a.devi@ifw-dresden.de.

Dalton Transactions (Cambridge, England : 2003)
|January 28, 2026
PubMed
Abstract

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