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Updated: Feb 5, 2026

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
Multifunctional lithium niobate platform for photodetection and photoacoustic and thermoelastic gas sensing
Haoyang Lin1, Huadan Zheng2, Wenguo Zhu1
1Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Department of Optoelectronic Engineering, Jinan University, Guangzhou, China.
Abstract:
Leveraging the intrinsic multi physics nature of ferroelectric lithium niobate, we present a multi-functional platform (LN-MFP) that seamlessly integrates photoacoustic spectroscopy, light-induced thermoelastic spectroscopy and photodetection into a single on-chip device. The proposed LN-MFP operates over a broad spectral range spanning from the visible to the mid infrared. We experimentally demonstrate trace gas detection of nitrogen dioxide, water vapor, acetylene, carbon dioxide, methane and ammonia, achieving parts-per-billion detection limits. We implement a custom packaging solution where the LN-MFP chip and a 4.6 µm quantum cascade laser chip are mounted on a printed circuit board together with transimpedance amplification, demonstrating system-level integration. Using this co-packaged module, we demonstrate carbon monoxide detection via second-harmonic measurements, outlining a clear route towards fully integrated on-chip implementations. This compact, hybrid, multi-functional architecture markedly reduces system complexity and footprint compared with conventional benchtop systems and is intrinsically compatible with the rapidly developing lithium niobate integrated photonics ecosystem. The LN-MFP provides a core sensing building block for future all-lithium-niobate spectroscopic chips for environmental monitoring, point-of-care diagnostics and on-site chemical analysis.
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