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Low-Temperature Ru-Ru Hybrid Bonding: Ar/H2 Plasma and NH4OH Synergistic Activation for Ultrahigh Density

Yufei Bai1, Jia Yang1, Xinze Li1

  • 1State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin 150001, China.

ACS Applied Materials & Interfaces
|February 5, 2026
PubMed
Abstract

Keywords:
hybrid bondinglow temperatureoxide reductionrutheniumsynergistic activation

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