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Wafer Handing Robotic Arm Vibration Trajectory Planning Based on Graylag Goose Optimization
1School of Mechanical Engineering, Shenyang Ligong University, Shenyang 110159, China.
Sensors (Basel, Switzerland)
|February 13, 2026
Summary
Semiconductor wafer-handling robots use Gray Goose Optimization (GGO) to suppress vibrations. This method improves positioning accuracy and system stability by optimizing trajectories for faster, smoother wafer transport.
Area of Science:
- Robotics and Automation
- Control Systems Engineering
- Optimization Algorithms
Background:
- Wafer-handling robots are critical in semiconductor manufacturing for high-speed, precise transport.
- Flexible components in lightweight, rapid-motion robots cause residual vibrations, reducing accuracy and stability.
Purpose of the Study:
- To propose a novel vibration-suppression trajectory planning method for wafer-handling robots.
- To enhance positioning accuracy and system stability in semiconductor manufacturing.
Main Methods:
- Utilized the Gray Goose Optimization (GGO) algorithm for multi-objective trajectory planning.
- Developed a multi-objective function balancing motion time and vibration energy.
- Determined optimal switching time points for S-shaped velocity profiles.
Main Results:
- GGO algorithm demonstrated effectiveness and robustness on benchmark functions.
- Planned trajectories showed negligible displacement variation under disturbances.
- Achieved Pareto-optimal solutions balancing motion time and residual vibration energy.
Conclusions:
- The GGO-based method effectively suppresses vibrations in wafer-handling robots.
- The approach enhances trajectory smoothness, velocity, and acceleration control.
- This leads to improved positioning accuracy and system stability in semiconductor manufacturing.
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