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A Novel 3D Probe for Near-Field Scanning Microwave Microscopy.

Ali M Almuhlafi1, Omar M Ramahi2

  • 1Department of Electrical Engineering, College of Engineering, King Saud University, Riyadh 12372, Saudi Arabia.

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|February 13, 2026
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Summary
This summary is machine-generated.

A novel three-dimensional near-field scanning microwave microscopy (NSMM) probe with enhanced electric-field localization improves imaging resolution. This 3D split-ring resonator (SRR) probe overcomes diffraction limits for detailed electromagnetic property analysis.

Keywords:
complementary split-ring resonatorsfield-spread functionnear-field scanning microwave microscopypoint-spread function

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Area of Science:

  • Applied Physics
  • Materials Science
  • Electromagnetism

Background:

  • Near-field scanning microwave microscopy (NSMM) faces challenges in achieving high resolution over practical scan areas.
  • Existing NSMM techniques are limited by the classical Abbe diffraction limit.

Purpose of the Study:

  • To introduce a novel three-dimensional (3D) NSMM probe for enhanced electromagnetic property probing.
  • To investigate how probe geometry influences spatial resolution and image fidelity.

Main Methods:

  • Development of a 3D NSMM probe using a split-ring resonator (SRR) coupled to a microstrip line and loaded with metallic bars.
  • Full-wave numerical simulations to extract the field-spread function (FSF) and analyze spatial-frequency content.
  • Fabrication using printed circuit board (PCB) technology and experimental validation.

Main Results:

  • The 3D probe design enhances electric-field localization via field singularities.
  • Simulations demonstrated that localized FSFs improve image fidelity and preserve higher spatial frequencies.
  • Experimental imaging of a dielectric slab with a void showed good agreement with the convolution model.

Conclusions:

  • The proposed 3D SRR-based probe acts as a spatial filter, enabling higher resolution in NSMM imaging.
  • Engineered near-field distribution is key to overcoming diffraction limits.
  • The probe design offers a pathway to improved nanoscale electromagnetic characterization.