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Flow-Induced Microdomain Alignment During Block Copolymer Graphoepitaxy.

Baopu Zhang¹, Mingchao Ma², Zehao Sun²

¹Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, USA.

Advanced Materials (Deerfield Beach, Fla.)

|February 15, 2026

Summary

This summary is machine-generated.

Block copolymer (BCP) graphoepitaxy uses self-assembly for nanofabrication. This study reveals how polymer flow during annealing controls BCP microdomain orientation within topographical templates, enabling precise pattern formation.

Keywords:

block copolymer flow‐induced microdomain alignment graphoepitaxy solvent vapor annealing

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Published on: June 1, 2016

Area of Science:

Materials Science
Nanotechnology
Polymer Science

Background:

Block copolymer (BCP) graphoepitaxy is a key nanofabrication technique relying on self-assembly.
The influence of substrate topography on polymer flow and resulting microdomain patterns in BCP graphoepitaxy is not fully understood.

Purpose of the Study:

To investigate the polymer flow dynamics during solvent vapor annealing in BCP graphoepitaxy.
To elucidate the relationship between flow processes, film thickness, and microdomain orientation relative to substrate topography.

Main Methods:

Analysis of film thickness profiles over time during solvent vapor annealing.
Characterization of microdomain morphologies and their orientation within etched trenches.
Correlation of flow timescales (capillary flow, dewetting) with observed microdomain alignment.

Main Results:

Capillary flow rapidly planarizes the BCP film to an incommensurate thickness within the first minute of annealing.
Dewetting occurs via island and hole formation, with extension direction (isotropic or anisotropic) dependent on film thickness.
Isotropic dewetting leads to microdomains transverse to trench sidewalls; anisotropic dewetting promotes alignment parallel to sidewalls.

Conclusions:

Polymer flow, specifically capillary flow and dewetting, significantly dictates the in-plane orientation of BCP microdomains.
Film thickness and trench topography are critical factors controlling dewetting behavior and subsequent microdomain alignment.
This work provides fundamental principles for controlling BCP microdomain orientation in graphoepitaxy for advanced nanofabrication.