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Updated: Jun 15, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
High-energy synchrotron X-ray multimodal computed tomography: enabling multiscale materials characterization at
Mehmet Topsakal1, Daniel O'Nolan2, Michael Drakopoulos3
1Nuclear Science and Security, Brookhaven National Laboratory, Upton, NY 11973, USA.
Abstract:
We report the commissioning of a multimodal computed tomography experimental setup at the 28-ID-2 (XPD) beamline of the National Synchrotron Light Source II. This high-energy (>60 keV) resource features a tunable X-ray beam size ranging from several millimetres to a few micrometres and enables comprehensive characterization of high-Z materials-an essential capability for nuclear and advanced materials research. It provides four complementary computed tomography modalities: X-ray absorption, X-ray fluorescence, X-ray diffraction, and pair distribution function tomography. A case study using a custom-made heterogeneous sample demonstrates these abilities to simultaneously capture atomic, elemental, and morphological information. This unique combination of imaging, structural, and chemical sensitive methods provides a holistic approach to study complex materials with amorphous and crystalline systems across multiple length scales.
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