Achieving a non-destructive ultra-smooth surface using a CeO₂ slurry modified with asphalt.

Area of Science:

• Materials Science
• Surface Engineering
• Optical Engineering

Background:

• Increasing demand for non-destructive ultra-smooth optical components.
• Challenges in achieving desired surface finish with conventional polishing methods.

Purpose of the Study:

• To develop a novel polishing liquid for ultra-smooth surface generation on optical components.
• To investigate the role of asphalt interface modification in small tool polishing.

Main Methods:

• Utilized dodecylbenzenesulfonic acid (DBSA) to modify the asphalt interface.
• Employed mineral oil (MO) and DBSA for emulsification and pad modification.
• Investigated abrasive particle dispersion, liquid stability, and contact angle reduction.

Main Results:

• Achieved ultra-smooth quartz glass surface with roughness Ra 0.097 nm over a 20×20 µm² area.
• DBSA promoted abrasive particle dispersion and polishing liquid stability.
• Reduced abrasive particle accumulation and average load at the interface.

Conclusions:

• The proposed polishing liquid with asphalt interface modification offers a novel approach for ultra-smooth surface fabrication.
• Mechanically induced chemical bond breaking is the primary material removal mechanism.
• This method achieves high-quality optical surfaces without surface or subsurface damage.