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    This study introduces a novel 3D-stacked flash LiDAR sensor for short-wave infrared applications. The sensor achieves high accuracy for indoor and outdoor ranging, demonstrating its potential for advanced imaging systems.

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    Area of Science:

    • Photonics and Optoelectronics
    • Integrated Circuits
    • Sensor Technology

    Background:

    • Short-wave infrared (SWIR) imaging is crucial for various applications, including autonomous driving and robotics.
    • Traditional LiDAR sensors often face limitations in terms of size, power consumption, and performance in challenging lighting conditions.
    • 3D stacking offers a pathway to miniaturize and enhance sensor capabilities.

    Purpose of the Study:

    • To present a room-temperature, 3D-stacked flash LiDAR sensor operating in the SWIR spectrum.
    • To demonstrate the sensor's ability to capture intensity images and depth maps with high accuracy.
    • To evaluate the sensor's performance under varying lighting conditions and ranges.

    Main Methods:

    • Development of a 96x96 InGaAs-InP Single-Photon Avalanche Diode (SPAD) array on a top tier.
    • Integration with a bottom tier featuring complementary cascoded gating for noise and afterpulsing reduction.
    • Fabrication using 110-nm CMOS technology.
    • Testing with a 1550nm laser and 3ns gating pulses.

    Main Results:

    • The sensor successfully generated intensity images and depth maps both indoors and outdoors.
    • Achieved accurate ranging up to 100m with better than 2% accuracy.
    • Demonstrated robust performance in 120 klux background light conditions.
    • Operated with a 1550nm laser across a power range of 100μW to 3.1mW.

    Conclusions:

    • The presented 3D-stacked flash LiDAR sensor is a significant advancement for SWIR imaging.
    • The sensor's performance validates the effectiveness of 3D stacking and advanced pixel-level gating techniques.
    • This technology holds promise for next-generation LiDAR systems requiring high accuracy and performance in diverse environments.