Frequency-decomposition of complex trajectory for high-speed and precise laser processing using a hybrid galvo-AOD...

Area of Science:

• Laser Material Processing
• Optical Engineering
• Control Systems

Background:

• Laser micro-processing demands high precision and efficiency.
• Hybrid scanning systems combining galvanometer scanners (galvos) and acousto-optical deflectors (AODs) offer potential for improved performance.
• Complex trajectory planning is a key challenge in hybrid scanning systems.

Purpose of the Study:

• To develop a frequency-decomposition-based method for trajectory planning in hybrid galvo-AOD scanning systems.
• To enhance the precision and efficiency of laser micro-processing applications.
• To provide an effective parameter optimization methodology for industrial high-end manufacturing.

Main Methods:

• A digital elliptic low-pass filter was designed for pre-discrete trajectory decomposition.
• Trajectory optimization was performed considering the field of view of AODs.
• Galvanometer response frequency and acceleration limits were incorporated to determine allowable processing parameters.

Main Results:

• The proposed method achieved a processing frequency of 190 kHz.
• An efficiency improvement of at least 3.8-fold was demonstrated compared to galvo-only systems.
• Contour accuracy was maintained during high-speed processing.

Conclusions:

• Frequency-domain decomposition offers a practical solution for complex trajectory planning in hybrid scanning systems.
• The developed method provides effective parameter optimization for industrial laser micro-processing.
• This approach significantly improves efficiency and precision in advanced manufacturing applications.