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Fluorocarbon-Free Hierarchical Slippery Copper Surfaces via Solid-State Electrochemical Etching.
1Department of Mechanical Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan.
ACS Applied Materials & Interfaces
|February 26, 2026
Summary
A novel copper-ion-loaded polymer electrolyte membrane (PEM) stamp enables efficient, scalable solid-state electrochemical etching of copper. This method creates high-resolution micro/nanoscale copper patterns for advanced electronics and functional surfaces.
Area of Science:
- Materials Science
- Electrochemistry
- Surface Engineering
Background:
- Micro- and nanoscale copper patterns are critical for flexible electronics, thermal management, and functional surfaces.
- Current copper patterning methods are complex, chemically intensive, and multistep.
- Solid-state electrochemical etching with polymer electrolyte membranes (PEM) has been limited to shallow depths.
Purpose of the Study:
- To develop an efficient and scalable method for solid-state electrochemical etching of copper.
- To introduce a copper-ion-loaded PEM (CuSO4 PEM) stamp for enhanced copper patterning.
- To fabricate 3D hierarchical copper structures with advanced surface properties.
Main Methods:
- Utilized a copper-ion-loaded PEM (CuSO4 PEM) stamp for solid-state electrochemical etching.
- Employed high-humidity conditions (90%) and controlled voltage (500 mV) for deep etching of copper foils.
- Fabricated micro/nanohierarchical structures using a hierarchical PEM stamp.
Main Results:
- Achieved uniform through-etching of 10 μm copper foils and deep etching up to 30 μm.
- Transferred well-defined submillimeter-scale patterns (line-and-space, honeycomb, square-grid) with high fidelity.
- Created 3D copper micro/nanohierarchical structures with nanopillar arrays on surfaces and sidewalls.
Conclusions:
- The CuSO4 PEM stamp enables efficient, scalable, and high-resolution copper patterning via solid-state electrochemical etching.
- The fabricated hierarchical structures exhibit enhanced wetting control, enabling functional surfaces like slippery liquid-infused porous surfaces.
- This approach offers reduced environmental impact, lower processing costs, and broad potential in electronics, thermal management, and microfluidics.

