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Efficient Mapping and Tracking the Properties of Micromechanical Resonators Using Phase-Lock Loops with

Agnes Zinth1,2,3, Samer Houri4, Menno Poot1,3,5

  • 1Department of Physics, TUM School of Natural Sciences, Technical University of Munich, D-85748 Garching, Germany.

Micromachines
|February 27, 2026
PubMed

Keywords:
MEMS and NEMSmembranemode mappingphase-locked loopsilicon nitridetracking

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