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Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

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Published on: December 27, 2012

Terahertz MEMS actuators and applications.

Zilai Wang¹, Naibo Zhang^2,3,4, Yiran Zhang¹

¹School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.

Microsystems & Nanoengineering

|February 27, 2026

Summary

Micro-electromechanical systems (MEMS) actuators are revolutionizing terahertz devices with miniaturization and high performance. This review details advancements in terahertz MEMS actuators for applications like 6G communication and imaging.

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Area of Science:

Terahertz technology
Micro-electromechanical systems (MEMS)

Background:

MEMS actuators offer miniaturization, low power, and high integration for dynamic control of terahertz devices.
These actuators are crucial for enhancing the performance of terahertz systems.

Purpose of the Study:

To provide a comprehensive review of technological advancements in terahertz MEMS actuators.
To analyze performance characteristics of driving mechanisms and integration strategies.
To highlight applications and future development trajectories.

Main Methods:

Systematic review of fundamental technological advancements.
Analysis of performance characteristics of various driving mechanisms.
Examination of integration strategies and diverse actuator forms.

Main Results:

Terahertz MEMS actuators demonstrate wideband tuning, high-sensitivity sensing, and modulation of electromagnetic responses.
Significant advancements are noted in terahertz switches and tunable resonators.
Applications span sensing, frequency/polarization tuning, beamforming, and logical operations.

Conclusions:

Terahertz MEMS actuators are key to advancing terahertz devices.
Cutting-edge techniques enable sophisticated electromagnetic responses.
Future development supports practical applications in 6G communication, imaging, and sensing.