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Author Spotlight: Introduction to Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays
Published on: June 13, 2023
Jingzhe Zhang1, Rui Sun1, Bo Li1
1College of Engineering, Yanbian University, Yanji 133002, China.
Semiconductor wafer defects are detected using a new Dual-Axis Attention-enhanced multi-scale fusion You Only Look Once version 13 (DAS-YOLOv13) model. This advanced method significantly improves the accuracy of identifying tiny, multi-scale defects on wafer surfaces.
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