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Updated: Mar 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Lensless variable magnification by 200 µm single-fiber ghost imaging
Abstract:
We demonstrate lensless variable magnification by 200 µm single-fiber ghost imaging with a spatial resolution of 10 µm. The proposed scheme enables tuning of the spatial resolution and field of view by adjusting the analysis region and the sampling interval. We evaluated imaging with and without pixel binning in analysis areas of 540×540, 200×200, and 100×100pixels. Without binning, the image reconstructed from the 100×100pixel region successfully visualized a 30 µm particle size measurement target. In displacement experiments conducted at 4 µm intervals, a spatial resolution of 10 µm was achieved.
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