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Non-iterative heterogeneous phase zoning enabling controllable intensity and morphology in multi-focus array
Applied Optics
|March 17, 2026
Summary
A new non-iterative heterogeneous phase zoning (NHPZ) method precisely controls multi-focus laser arrays. This technique tailors intensity and morphology for advanced micro/nanofabrication and optical applications.
Area of Science:
- Optics and Photonics
- Laser Physics
- Microfabrication
Background:
- Controlling multi-focus laser arrays is crucial for parallel processing.
- Intensity inhomogeneity in multi-focus arrays limits fabrication precision.
Purpose of the Study:
- To introduce a novel non-iterative heterogeneous phase zoning (NHPZ) method for precise control of multi-focus arrays.
- To enable tailored intensity distributions and focal spot morphologies in laser arrays.
Main Methods:
- Derivation of a phase factor expression using vectorial diffraction theory.
- Division of the pupil plane into sector-shaped zones with adjustable phase factors.
- Numerical simulations and experimental validation of the NHPZ method.
Main Results:
- Demonstrated precise control over individual focal spot intensity and morphology.
- Successfully generated and modulated multi-focus arrays with various beam structures (Gaussian, vortex, Bessel, Airy).
- Validated the NHPZ method in femtosecond laser direct writing (TPP-DLW) for micro/nanostructure fabrication.
Conclusions:
- The NHPZ method offers an efficient and accurate solution for intensity inhomogeneity in multi-focus parallel fabrication.
- This technique has significant potential in micro/nano fabrication, optical sensing, and imaging.
