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Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
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Non-iterative heterogeneous phase zoning enabling controllable intensity and morphology in multi-focus array

Ran Zhang, Ximeng Yang, Yujiang Liu

    Applied Optics
    |March 17, 2026
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    Summary

    A new non-iterative heterogeneous phase zoning (NHPZ) method precisely controls multi-focus laser arrays. This technique tailors intensity and morphology for advanced micro/nanofabrication and optical applications.

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    Area of Science:

    • Optics and Photonics
    • Laser Physics
    • Microfabrication

    Background:

    • Controlling multi-focus laser arrays is crucial for parallel processing.
    • Intensity inhomogeneity in multi-focus arrays limits fabrication precision.

    Purpose of the Study:

    • To introduce a novel non-iterative heterogeneous phase zoning (NHPZ) method for precise control of multi-focus arrays.
    • To enable tailored intensity distributions and focal spot morphologies in laser arrays.

    Main Methods:

    • Derivation of a phase factor expression using vectorial diffraction theory.
    • Division of the pupil plane into sector-shaped zones with adjustable phase factors.
    • Numerical simulations and experimental validation of the NHPZ method.

    Main Results:

    • Demonstrated precise control over individual focal spot intensity and morphology.
    • Successfully generated and modulated multi-focus arrays with various beam structures (Gaussian, vortex, Bessel, Airy).
    • Validated the NHPZ method in femtosecond laser direct writing (TPP-DLW) for micro/nanostructure fabrication.

    Conclusions:

    • The NHPZ method offers an efficient and accurate solution for intensity inhomogeneity in multi-focus parallel fabrication.
    • This technique has significant potential in micro/nano fabrication, optical sensing, and imaging.