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Variable-density scanning strategy and ROI density analysis for high-precision MEMS LiDAR.
Applied Optics
|March 17, 2026
Summary
This study introduces a phase modulation (PM) strategy for Micro-Electro-Mechanical Systems (MEMS) LiDAR, enabling dynamic, variable-density scanning. This approach enhances resolution in critical areas without redundancy, improving industrial robotics applications.
Area of Science:
- Optoelectronics and Photonics
- Robotics and Automation
- Micro-Electro-Mechanical Systems (MEMS)
Background:
- Conventional Lissajous scanning in MEMS LiDAR for industrial robotics results in fixed-density point clouds.
- This fixed density leads to sparse resolution in regions of interest (ROI) and redundant data in non-critical areas.
- Addressing these limitations is crucial for improving LiDAR system efficiency and accuracy in industrial applications.
Purpose of the Study:
- To propose a phase modulation (PM) strategy for dynamic adaptive variable-density ROI scanning in MEMS LiDAR.
- To enable localized density enhancement without global redundancy using a single resonant mirror.
- To improve LiDAR system integration and accuracy for industrial robotics.
Main Methods:
- Implementation of a phase modulation (PM) strategy for dynamic adaptive variable-density scanning.
- Utilizing three types of variable density modulation for ROI switching within a nine-grid region.
- Employing kernel density estimation to quantify scanning density and a minimum angular separation method for assessment.
Main Results:
- Achieved a peak scanning density of 10.3596 in ROIs.
- Demonstrated a decrease in angular separation by up to 68.26% and an increase in scanning density by up to 75.52% compared to conventional methods.
- Experimental results confirmed seamless, interference-free transitions between ROI modes, aligning with theoretical predictions.
Conclusions:
- The proposed PM strategy effectively enables dynamic adaptive variable-density scanning in MEMS LiDAR.
- The method enhances localized density in ROIs without global redundancy and avoids the need for multiple mirrors.
- This contributes significantly to improved LiDAR system integration and accuracy in industrial robotics.

