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Related Experiment Video

Updated: Mar 29, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Tunable Bandpass Filtering in Coupled Nanodrums Enabled by 1:1 Internal Resonance.

Yikun Liu1, Jiaxin Miao1, Haoran Wang1

  • 1School of Mechanical Engineering, Sichuan University, Chengdu 610065, China.

Micromachines
|March 28, 2026
PubMed
Summary

This study introduces a new gate-programmable tuning strategy for nanoelectromechanical systems (NEMS) using 1:1 internal resonance in 2D materials. This method enables high-frequency operation and wide-range reconfigurability for NEMS filters.

Keywords:
1:1 internal resonancehigh tunabilitynanoelectromechanical resonatorradio frequency (RF)two-dimensional materials

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Area of Science:

  • Nanoelectromechanical Systems (NEMS)
  • Materials Science
  • Electrical Engineering

Background:

  • Microelectromechanical systems (MEMS) filters offer programmable passband shaping but suffer from low frequencies and limited tuning.
  • Existing designs struggle with achieving both high operating frequencies and a wide electrical tuning range simultaneously.

Purpose of the Study:

  • To propose and analyze a gate-programmable tuning strategy for 2D material-based NEMS filters.
  • To leverage 1:1 internal resonance for high-frequency operation and wide-range reconfigurability.
  • To demonstrate a two-step tuning strategy for both center-frequency and bandwidth control.

Main Methods:

  • Theoretical modeling and numerical simulations of 2D material-based NEMS resonators.
  • Exploiting 1:1 internal resonance and electrostatic tunability of materials like MoS2.
  • Analyzing the effect of gate voltage sweeps and bias mismatches on filter response.

Main Results:

  • Achieved wide-range programmability up to f/f0≈200% with quasi-linear passband shift at 4.4 MHz/V.
  • Demonstrated highly sensitive bandwidth trimming from 3.18 to 5.20 kHz using mV-level bias mismatch.
  • A three-drum NEMS resonator design achieved a 4x wider bandwidth (21.79 kHz) compared to a two-drum design.

Conclusions:

  • 1:1 internal resonance is an effective strategy for tuning the bandpass response of NEMS resonators.
  • The proposed gate-programmable strategy enables high-frequency operation, wide-range reconfigurability, and precise control over NEMS filter characteristics.
  • This work paves the way for advanced NEMS filter designs with enhanced performance.