Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Regenerative Polysulfide-Scavenging Layers Enabling Lithium-Sulfur Batteries with High Energy Density and Prolonged Cycling Life.

ACS nano·2017
Same author

PdAuCu Nanobranch as Self-Repairing Electrocatalyst for Oxygen Reduction Reaction.

ChemSusChem·2017
Same author

Trapdoor spiders of the genus <i>Cyclocosmia</i> Ausserer, 1871 from China and Vietnam (Araneae, Ctenizidae).

ZooKeys·2017
Same author

The complete genome sequence, occurrence and host range of Tomato mottle mosaic virus Chinese isolate.

Virology journal·2017
Same author

Tunneling nanotubes promote intercellular mitochondria transfer followed by increased invasiveness in bladder cancer cells.

Oncotarget·2017
Same author

Assessment of histopathological features of needle biopsy in recurrent prostate cancer following salvage high-intensity focused ultrasound.

Canadian Urological Association journal = Journal de l'Association des urologues du Canada·2017
Same journal

Neural Regulation of Cardiac Arrhythmias: From the Brain-Heart Axis to Emerging Precision Therapies.

Research (Washington, D.C.)·2026
Same journal

N<sup>6</sup>-Methyladenosine on Key Messenger RNAs Governs Reproductive Development and Metabolic Adaptation in Human Blood Fluke.

Research (Washington, D.C.)·2026
Same journal

Additive-Free Contact-Electro-Catalysis/Vacuum Ultraviolet System for Rapid Mitigation of Antimicrobial-Resistance-Associated Contaminants in Water.

Research (Washington, D.C.)·2026
Same journal

Predicting 1-Year Renal Outcomes in Patients with Diabetic Kidney Disease in CKD Stages 3 to 4: A Multimodal Machine Learning Approach Fusing Clinical Composites and Pathology Images.

Research (Washington, D.C.)·2026
Same journal

Antioxidant Nanozymes: From Rational Design to Biomedical Applications.

Research (Washington, D.C.)·2026
Same journal

Quantum-Inspired Fast Algorithm and Circuit Realization for Constrained Combinatorial Optimization Problem.

Research (Washington, D.C.)·2026
See all related articles

Related Experiment Video

Updated: Mar 27, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

10.8K

Asymmetric Diffusion Metasurface-Based Lensless Monitoring and Uniform Illumination Systems for Optical Lithography.

Guangbiao Wang1,2, Yanhua Shen2,3, Yazhi Pi2

  • 1School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou 510275, China.

Research (Washington, D.C.)
|March 25, 2026
PubMed
Summary
This summary is machine-generated.

This study introduces a novel metasurface illumination system for compact lithography, achieving uniform ultraviolet light and real-time monitoring. The lensless design integrates light homogenization and adaptive feedback for advanced manufacturing.

More Related Videos

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces
09:33

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

Published on: June 7, 2019

6.8K
Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution
08:41

Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution

Published on: August 16, 2012

12.1K

Related Experiment Videos

Last Updated: Mar 27, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

10.8K
Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces
09:33

Demonstration of Equal-Intensity Beam Generation by Dielectric Metasurfaces

Published on: June 7, 2019

6.8K
Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution
08:41

Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution

Published on: August 16, 2012

12.1K

Area of Science:

  • Optics
  • Metasurface technology
  • Lithography

Background:

  • Traditional lithographic tools face limitations due to the trade-off between illumination uniformity and system complexity.
  • Developing compact and efficient lithographic systems remains a significant challenge.

Purpose of the Study:

  • To overcome the limitations of conventional lens-based illumination systems in compact lithography.
  • To introduce a metasurface-enabled lensless system for light homogenization and monitoring.

Main Methods:

  • Integration of an asymmetric diffusion metasurface with intelligent optimization algorithms.
  • Development of a large-field lithography platform incorporating the metasurface system.
  • Implementation of a gray-level to power-level mapping algorithm for real-time LED performance assessment.

Main Results:

  • Achieved uniform ultraviolet illumination with <3% nonuniformity.
  • Demonstrated successful pattern exposure across various feature sizes.
  • Enabled real-time diagnostics and adaptive reconfiguration of exposure settings.

Conclusions:

  • The metasurface-lensless system offers a new paradigm for compact, low-cost, and scalable lithographic illumination.
  • Synergy between metasurface optics and algorithmic intelligence paves the way for next-generation intelligent manufacturing.
  • The system provides precise light field control and self-adaptive feedback without complex lens assemblies.