Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and...

Area of Science:

• Microfluidics
• MEMS Actuators
• Biocompatible Materials

Background:

• Microfluidic applications like lab-on-a-chip and diagnostics rely heavily on micro-electromechanical systems (MEMS) actuators.
• Significant advancements in materials, microfabrication, and computational modeling over the past decade have expanded the capabilities of MEMS-based microfluidic actuation.

Purpose of the Study:

• To review the development and progress of MEMS actuators for microfluidic applications.
• To classify MEMS actuators based on actuation methods and their use in pumping, valving, and droplet control.
• To examine emerging materials, multiphysics modeling, and future research directions.

Main Methods:

• Classification of MEMS actuators by actuation physics (electrostatic, piezoelectric, pneumatic).
• Evaluation of materials like piezoelectric thin-films and electroactive polymers for reliability and biocompatibility.
• Review of multiphysics modeling incorporating electrical, thermal, mechanical, and fluidic aspects.

Main Results:

• MEMS actuators are increasingly functional due to advances in materials, fabrication, and AI-assisted design.
• Emerging materials show promise, but reliability and biocompatibility require further attention.
• Multiphysics modeling aids in efficient design and optimization of MEMS actuators.
• Trends include multifunctional actuators with integrated sensing and AI in design.

Conclusions:

• Despite progress, challenges in power efficiency, thermal management, fabrication uniformity, and durability persist.
• Standardized benchmarking is needed for reliable comparison of MEMS actuators.
• Future research should focus on hybrid actuation, intelligent microfluidic operations, and scaling up lab demonstrations for industrial applications.