Structural color due to guided-mode resonance in silicon-on-insulator irradiated by nanosecond laser pulses

We demonstrate structural color generation in silicon-on-insulator wafers using nanosecond laser irradiation. Laser-induced periodic surface structures on the thin Si film act as grating couplers, enabling optical resonances that produce bright, spectrally selective structural colors at visible wavelengths. The mechanism combines grating-mediated waveguide coupling with Fabry-Perot spectral filtering, yielding optical characteristics resembling guided-mode resonance. The central wavelength is tunable across the visible spectrum by varying Si film thickness (50-70 nm range), with measured samples exhibiting green coloration at 55 nm and red at 70 nm thickness. Numerical simulations qualitatively reproduce the observed optical properties. This non-chemical, non-fading coloration offers potential applications in secure marking and process control for semiconductor manufacturing.