Dynamic analysis of chainlike design piezoelectric stick-slip actuator for high-precision motion

A novel asymmetric structure of piezoelectric stick-slip actuator (PSSA) with chainlike compliant mechanism is designed, which satisfies the requirements of high-precision, long-stroke nano-scale motion control. The combined structure of asymmetric chainlike compliant mechanism with PSSA is used to enhance the compliance. Backward displacement is suppressed by chainlike piezoelectric stick-slip actuator (CPSSA). The CPSSA is designed to enlarge the single-step displacement and to improve the output performance. Subsequently, finite element analysis is employed to compute the parametric design of the structure. Then, the dynamic stiffness matrix analysis of the structure is given. Finally, an experimental system is constructed, and a range of test data are presented. The experimental findings demonstrate that the peak output speed of the actuator is 19.01 mm/s, while the horizontal loading capability and vertical loading capacity are determined to be 3.8 and 2.46 N, and the resolution is 56 nm, respectively. The effectiveness of the chainlike piezoelectric stick-slip actuator (CPSSA) is thereby verified.