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Related Experiment Video

Updated: Apr 22, 2026

Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator

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Microelectromechanical Systems-Tunable Reflective Metalenses for Switchable Focusing between Two Arbitrary Phase

Zhihao Zhu^1,2, Mingwei Tang^1,3, Paul C V Thrane⁴

¹State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang Key Laboratory of Autonomous Optoelectronic Perception, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China.

|April 21, 2026

Summary

This summary is machine-generated.

This study introduces a microelectromechanical systems (MEMS)-tunable metalens (ML) platform for dynamic wavefront shaping. This novel approach enables arbitrary, continuous 2π-phase modulation for two independent states, overcoming limitations of existing reconfigurable optics.

Keywords:

MEMS bilayer metasurface plasmonic tunable metalenses varifocal vortex wavefront control

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Area of Science:

Optics and Photonics
Materials Science
Microelectromechanical Systems

Background:

Dynamic metasurfaces (MSs) offer potential for ultracompact reconfigurable optics.
Current tuning strategies struggle with arbitrary, continuous 2π-phase modulation for dual independent states in wavefront shaping.
This limits meta-devices to switching between distinct phase profiles and optical functions.

Purpose of the Study:

To overcome limitations in dynamic wavefront shaping for reconfigurable optics.
To develop a tunable metalens (ML) platform enabling arbitrary and continuous 2π-phase modulation for two independent states.
To demonstrate dual-phase-map switching for distinct optical functions.

Main Methods:

Integration of a bilayer metasurface (BMS) with a piezoelectric microelectromechanical systems (MEMS) mirror.
Development of a MEMS-tunable ML platform for dynamic wavefront shaping.
Experimental realization of switchable off-axis focusing and vortex metalenses.

Main Results:

Achieved full 360° × 360° phase coverage in two independently addressable states with high reflection amplitude (0.74-0.85).
Demonstrated high-efficiency (30-40%) operation across a 650-850 nm spectral range with fast switching (0.58/0.4 ms rise/fall times).
Successfully realized switchable off-axis focusing and vortex focusing metalenses.

Conclusions:

The MEMS-tunable ML platform enables arbitrary, dynamically controlled dual-phase-map switching.
This technology overcomes previous restrictions, paving the way for advanced reconfigurable optical systems.
The platform can be extended for diverse dynamic optical functionalities, enriching compact optical device portfolios.