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Fabry-Perot cascade interferometer for temperature measurement of Si microstructures
Applied Optics
|April 24, 2026
Summary
Accurately measuring MEMS micromirror temperature is crucial. A novel optical technique using coherence-tuned Fabry-Perot interferometry provides precise, non-contact temperature validation for silicon microelectromechanical systems.
Area of Science:
- Optics and Photonics
- Materials Science
- Microelectromechanical Systems (MEMS)
Background:
- Silicon MEMS micromirrors require accurate temperature validation under high optical loads.
- Traditional thermal modeling faces parameter uncertainties, and non-contact methods struggle with thin silicon structures.
Purpose of the Study:
- To develop and validate a novel optical technique for precise temperature measurement of MEMS micromirror plates.
- To overcome limitations of existing thermal modeling and measurement methods for MEMS devices.
Main Methods:
- Utilized coherence-tuned Fabry-Perot interferometry with two sequential interferometers and an incoherent source.
- Isolating the temperature-dependent refractive index change in the mirror plate by excluding substrate reflections.
Main Results:
- Achieved temperature uncertainty of ±2°C over a 40°C-200°C range when calibrated.
- Demonstrated a novel, non-contact method for thermal characterization of MEMS devices.
Conclusions:
- The developed optical technique enables accurate thermal characterization of MEMS micromirrors.
- This method is suitable for MEMS devices where conventional contact-based measurements are impractical.
