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    This study introduces a novel method to improve excimer laser homogenizers by using random phase plates (RPPs) to reduce beam non-uniformity. The optimized RPP design significantly enhances laser beam quality for various applications.

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    Area of Science:

    • Optics and Photonics
    • Laser Technology
    • Optical Engineering

    Background:

    • Excimer laser homogenizers using microlens arrays (MLAs) suffer from spatial coherence issues, leading to interference fringes and output beam non-uniformity.
    • These imperfections limit the performance of MLA-based homogenizers in applications requiring uniform laser beams.

    Purpose of the Study:

    • To develop a theoretical framework for modeling excimer laser propagation through homogenizers with random phase plate (RPP) modulation.
    • To establish an optical tolerance evaluation scheme using Latin hypercube sampling (LHS).
    • To design an optimized RPP using a hybrid particle swarm and grey wolf optimization (HPSO-GWO) algorithm to minimize beam non-uniformity.

    Main Methods:

    • Development of a theoretical model for excimer laser propagation in MLA homogenizers incorporating RPPs.
    • Implementation of a Latin hypercube sampling (LHS) based scheme for optical tolerance analysis.
    • Design and optimization of RPPs using the hybrid particle swarm and grey wolf optimization (HPSO-GWO) algorithm.

    Main Results:

    • A novel RPP design based on HPSO-GWO achieved a homogenizer output beam non-uniformity of 1.82%.
    • Individual assessment of RPP assembly tolerances (tilt, decenter, manufacturing) on homogenizer performance.
    • Variance-based global sensitivity analysis quantified the impact and interactions of various tolerance factors.

    Conclusions:

    • The proposed RPP design and optimization strategy effectively mitigate non-uniformity in excimer laser homogenizers.
    • The optical tolerance evaluation scheme provides a robust method for assessing the impact of manufacturing and assembly variations.
    • This work offers a pathway to enhance the performance and reliability of laser homogenizers for demanding applications.