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Ronchi lateral shearing interferometry with binary encoded sinusoidal transmittance grating.

Huiwen Liu, Yicheng Zhu, Runzhou Shi

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    |May 4, 2026
    PubMed
    Summary
    This summary is machine-generated.

    This study introduces sinusoidal gratings for wavefront detection in lithography, simplifying interference patterns. This method enhances real-time capability and reduces errors compared to traditional double-grating Ronchi interferometry.

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    Area of Science:

    • Optical engineering
    • Metrology
    • Wavefront sensing

    Background:

    • Double-grating Ronchi lateral shearing interferometry is a key wavefront detection method for lithography projection lenses.
    • Traditional methods using Ronchi gratings create complex multi-wave interference, necessitating extensive phase-shifting for accurate phase retrieval.
    • This complexity compromises real-time detection accuracy and increases susceptibility to phase-shifting errors.

    Purpose of the Study:

    • To investigate the use of sinusoidal transmission gratings to simplify interference patterns in lateral shearing interferometry.
    • To analyze the performance of this new interferometry for low-NA optical systems.
    • To develop methods for fabricating accurate sinusoidal gratings for improved wavefront detection.

    Main Methods:

    • Replaced the standard Ronchi grating with a sinusoidal transmission grating in the object plane.
    • Analyzed the resulting interference fields using scalar diffraction theory for low-NA optical systems.
    • Employed binary encoded methods to approximate target sinusoidal transmittance distributions, addressing fabrication challenges.

    Main Results:

    • Sinusoidal gratings generate only 0th and conjugate 1st diffraction orders, reducing interference to two coherent patterns.
    • This simplification significantly reduces the required number of phase shifts for phase retrieval.
    • The proposed method demonstrates superior real-time capability and enhanced resistance to phase-shifting errors and environmental noise.

    Conclusions:

    • Sinusoidal gratings offer a more efficient and robust approach to wavefront detection in lithography projection systems.
    • The binary encoding technique provides a practical solution for fabricating the necessary gratings.
    • This advanced interferometry method improves accuracy and real-time performance over conventional double-grating Ronchi systems.