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Updated: Jul 5, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Universal High-Resolution Copper Patterning on Diverse Substrates via Sequential Laser-Induced Transfer and
Yaqiang Ji1, Juexuan Xu1, Weibin Yin1
1School of Mechanical Engineering, Dongguan University of Technology, Dongguan 523808, China.
Abstract:
The fabrication of high-resolution and mechanically robust copper patterns remain a critical challenge in flexible electronics. Here, we present a universal metallization strategy that combines sequential two-step laser transfer, including laser-induced backward transfer and laser-induced forward transfer, with subsequent electroless copper plating. In this approach, laser-induced backward transfer first generates a transferable copper particle donor layer; subsequently, laser-induced forward transfer selectively embeds these catalytic copper particles into the surface of target substrates, constructing spatially confined activation networks while minimizing direct thermal exposure. These embedded seeds are then amplified into continuous copper conductors via electroless copper plating, achieving a high-resolution pattern (average minimum linewidth of approximately 20 μm) with robust interfacial integrity. Benefiting from laser-induced mechanical interlocking, the resulting copper patterns exhibit a low electrical resistivity of ~2.0 × 10-8 Ω·m (comparable to bulk copper) and maintain stable electromechanical performance even after 8000 bending cycles across a radius range of 3 to 6 mm. Furthermore, the fabricated versatile electrodes are successfully integrated into a triboelectric nanogenerator for tactile sensing and Morse code transmission. With its inherent substrate universality (e.g., polyimide, wood, fabric, and paper) and process scalability, this strategy provides a versatile route for manufacturing reliable copper electrodes in next-generation flexible electronic systems.

