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Design and Implementation of High-Capacity DDR3 Micro-Module Based on 3D TSV Advanced Packaging
Haoyue Ji1,2, Liang Zeng2, Hongwen Qian2
1School of Electro-Mechnical Engineering, Xidian University, Xi'an 710071, China.
Micromachines
|May 4, 2026
Summary
Advanced 3D TSV technology enables a compact 4 GB DDR3 micro-module with a 95% smaller footprint. This innovation enhances computational density and energy efficiency for mobile and data center applications.
Area of Science:
- Electrical Engineering
- Materials Science
- Computer Engineering
Background:
- Modern electronic systems require miniaturization, lightweight design, and high performance.
- Advanced packaging technologies are crucial for meeting these demands.
- Three-dimensional Through-Silicon Via (3D TSV) technology offers solutions for increased storage capacity in constrained form factors.
Purpose of the Study:
- To propose a schematic design methodology for a four-layer stacked micro-module.
- To develop a system-level integrated modeling approach for wafer-level packaging.
- To demonstrate the feasibility of a compact, high-capacity memory module using heterogeneous integration and 3D TSV.
Main Methods:
- Leveraging heterogeneous chip fan-out technology for diverse chip integration.
- Utilizing TSV-based vertical stacking for three-dimensional integration.
- Implementing a system-level integrated modeling approach for design and validation.
- Fabricating a DDR3 micro-module with specific dimensions and specifications.
Main Results:
- A four-layer stacked DDR3 micro-module with a compact footprint (14 × 9 × 3.5 mm) was successfully fabricated.
- The micro-module achieved a storage capacity of 4 GB and a 64-bit bus width.
- A significant 95% reduction in footprint area compared to conventional board-level mounting was achieved.
- Comprehensive multi-level testing confirmed compliance with standard protocol requirements.
Conclusions:
- The proposed design methodology and modeling approach are effective for creating advanced micro-modules.
- The fabricated DDR3 micro-module represents a paradigm shift in form factors for mobile computing.
- The technology enhances computational density and energy efficiency, benefiting data center server applications.

