Advanced silicon nanomembrane based bioelectronics for flexible and stretchable implantable systems

As the paradigm of modern medicine shifts toward prevention and management, the importance of implantable electronics for real-time physiological monitoring and therapeutic intervention has surged, yet the mechanical mismatch between conventional rigid devices and soft tissues poses significant challenges regarding inflammation and long-term performance. Consequently, this review hierarchically analyzes advanced semiconductor integration strategies for flexible and stretchable implantable systems, utilizing Silicon Nanomembrane (SiNM) technology as a core building block to achieve mechanical compliance while maintaining CMOS compatibility. We systematically examine flexible substrate processing and patterning techniques, including laser-induced graphene (LIG) and printing methods, and place special emphasis on conformal encapsulation strategies using inorganic/organic multilayer thin films to ensure miniaturization and reliability in harsh biological environments. Furthermore, the review covers system-level integration issues, including hierarchical wireless communication strategies tailored to implantation depth and hybrid energy harvesting technologies for battery-free operation, ultimately proposing that the organic integration of these elements is essential for realizing next-generation "Fully Autonomous Bio-integrated Systems".