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Updated: May 14, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

Characterization of Squeeze Film Damping in Force Rebalance Accelerometers

Hasan Baran Özmen1,2, Melin Şahin2, Gökhan Osman Özgen3

  • 1Roketsan A.Ş., Lalahan, Mamak, Ankara 06852, Türkiye.

Sensors (Basel, Switzerland)
|May 13, 2026
PubMed

Keywords:
closed loop system modellingcontrol system modellingfinite element modelling and analysisforce rebalance accelerometeropen loop system modellingsqueeze film damping

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