Wirelessly Interrogated, Implantable Capacitive MEMS Sensors for Continuous Intraocular Pressure Monitoring

This work presents wirelessly interrogated microelectromechanical system (MEMS) capacitive sensors for continuous intraocular pressure (IOP) monitoring. The sensor uses a passive inductor-capacitor (LC) tank circuit comprising a fixed, on-chip spiral inductor and a pressure-sensitive, variable-gap capacitor with parallel-plate membrane electrodes and side anchors. The membrane is designed with dimensions of 500 µm × 500 µm × 2 µm and a capacitive transducer gap of 2.5 µm. Applied pressure deflects the top membrane, producing a corresponding capacitance variation that changes the frequency and phase response of the LC tank circuit, enabling real-time and continuous IOP monitoring over a target detection range of 0-50 mmHg and beyond. Mutual inductive coupling between the sensor and the external readout coil is investigated as a reliable readout mechanism.