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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Localized guided-mode resonance-enabled highly angle-insensitive optical filtering.

Iqra Mamoon, Qingquan Liu, Md Dulal Haque

    Optics Letters
    |May 15, 2026
    PubMed
    Summary
    This summary is machine-generated.

    This study introduces a novel localized guided-mode resonance (LGMR) notch filter that overcomes angle sensitivity in optical filters. The compact design offers stable spectral filtering for applications like Raman spectroscopy and optical communication.

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    Area of Science:

    • Photonics and optical engineering
    • Nanophotonics
    • Materials science

    Background:

    • Conventional Fabry-Pérot (F-P) and guided-mode resonance (GMR) filters suffer from angle sensitivity due to transverse wave vector dependence.
    • This limitation hinders performance in applications requiring stable spectral filtering across various incident angles.

    Purpose of the Study:

    • To propose and demonstrate a compact planar notch filter utilizing localized guided-mode resonance (LGMR).
    • To achieve angle-insensitive spectral filtering by suppressing angular dispersion.

    Main Methods:

    • Embedding a metallic grating within a tri-layer SiO2-Si-SiO2 structure.
    • Utilizing finite-difference time-domain (FDTD) numerical simulations.
    • Designing for three-dimensional (3D) confinement of the transverse wave vector.

    Main Results:

    • A flat stop band centered near 1.55 µm was achieved.
    • Minimal wavelength shift of 7.4 nm was observed over a wide angular range (0°-70°).
    • Spectral tunability in the near-infrared (NIR) region was demonstrated by adjusting the grating period.

    Conclusions:

    • The proposed LGMR notch filter effectively suppresses angular dispersion, offering stable spectral filtering.
    • This robust and integrable solution is suitable for angle-insensitive applications like Raman spectroscopy and optical communication.