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Updated: May 28, 2026

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Lin Liu1, Jinxiao Li1, Lei Wu1
1School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.
This study introduces a dopant-free annealing method to control vanadium dioxide (VO2) films by engineering oxygen vacancies. This technique enables tunable electrical and infrared properties for advanced devices without complex processing.
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