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Harnessing scanning probe lithography for integrated photonics with anisotropic materials
Alexey Kuznetsov1,2, Bogdan R Borodin3, Maria A Anikina1,2
1Moscow Center for Advanced Studies, Kulakova str. 20, Moscow, 123592, Russia.
Nanoscale
|May 27, 2026
Summary
Researchers developed a damage-free method to pattern photonic waveguides in layered semiconductors. This crystallography-guided approach preserves material integrity, enabling robust on-chip signal transmission for nanophotonic circuits.
Area of Science:
- Materials Science
- Nanophotonics
- Semiconductor Physics
Background:
- Integrating high-index, wide-bandgap layered semiconductors into nanophotonic circuits is challenging due to mechanical anisotropy and lack of damage-free fabrication methods.
- Existing techniques like focused ion beam milling cause amorphization and ion-induced damage, hindering device performance.
Purpose of the Study:
- To develop a deterministic, crystallography-guided fabrication technique for patterning photonic waveguides in mechanically anisotropic layered semiconductors.
- To demonstrate damage-free fabrication of nanophotonic components preserving crystalline integrity.
Main Methods:
- Utilized mechanical scanning probe lithography (SPL) in frictional mode on gallium indium sulfide (GaInS3).
- Employed a "compass-rose" lithography step to map in-plane cleavage anisotropy and identify low-energy armchair directions.
- Fabricated 70 nm-thick strip waveguides aligned with identified crystallographic axes.
Main Results:
- Achieved sub-10 nm edge roughness in patterned trenches by aligning with armchair directions.
- Demonstrated robust single-mode operation of waveguides in the visible range (505-630 nm).
- Showcased superior performance compared to focused ion beam milling, which resulted in mode extinction due to damage.
Conclusions:
- The frictional SPL protocol offers a resist-free, etch-free route for rapid prototyping of nanophotonic components in anisotropic materials.
- This method preserves lattice integrity, enabling on-chip signal transmission and paving the way for complex photonic circuits.
- Established a platform for exploring nanophotonics in materials where avoiding lattice damage is critical.
