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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Role of the Casimir force in the capacitive radio frequency microelectromechanical switches

G L Klimchitskaya1,2, A S Korotkov2, V V Loboda2

  • 1Central Astronomical Observatory at Pulkovo of the Russian Academy of Sciences, St. Petersburg 196140, Russia.

The Journal of Chemical Physics
|June 9, 2026
PubMed

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