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Related Concept Videos

Confocal Fluorescence Microscopy01:16

Confocal Fluorescence Microscopy

Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...

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Related Experiment Video

Updated: Jun 12, 2026

Low-cost Custom Fabrication and Mode-locked Operation of an All-normal-dispersion Femtosecond Fiber Laser for Multiphoton Microscopy
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A streamlined set-up for Lloyd's mirror interference lithography, using a single-mode-fibre-coupled laser.

Enkui Lian1, Eleni Perivolari1, Yu Liu2

  • 1Department of Chemistry and Bioengineering, Norwegian University of Science and Technology, Trondheim, Trøndelag, Norway.

Microsystems & Nanoengineering
|June 10, 2026
PubMed
Summary
This summary is machine-generated.

This study presents a simplified Lloyd's-mirror-based laser interference lithography (LM-LIL) setup. The streamlined approach enables efficient fabrication of nanoscale patterns with pitches down to sub-220 nm.

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Last Updated: Jun 12, 2026

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Area of Science:

  • Nanofabrication
  • Optical Lithography
  • Laser Technology

Background:

  • Traditional laser interference lithography (LIL) setups often require complex alignment procedures.
  • Free-space lasers and spatial filters add to the complexity and cost of LIL experiments.

Purpose of the Study:

  • To develop a simplified and cost-effective setup for Lloyd's-mirror-based laser interference lithography (LM-LIL).
  • To demonstrate the preparation of high-resolution one- and two-dimensional arrays using the streamlined system.

Main Methods:

  • Utilized a fibre-coupled single-frequency laser (SFL) as the light source, eliminating the need for manual beam alignment.
  • Employed a simple optical configuration consisting of the SFL, a plane mirror, and an optional half-wave plate.
  • Detailed step-by-step procedures for sample preparation, exposure, and processing were provided.

Main Results:

  • Achieved pitches down to the sub-220-nm level using a 405-nm laser.
  • The simplified setup proved to be inexpensive, robust, and easy to use.
  • Successfully fabricated one- and two-dimensional periodic arrays.

Conclusions:

  • The streamlined LM-LIL setup significantly simplifies experimental implementation.
  • This method offers a practical and accessible approach for nanoscale pattern fabrication.
  • The system is suitable for preparing high-density periodic structures for various applications.