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Atomic Force Microscopy

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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Interface profilometry with third harmonic generation microscopy.

Joshua H Magnus, Lam T Nguyen, Roland Himmelhuber

|June 11, 2026

Summary

This summary is machine-generated.

We developed a nanometer-scale surface profilometry technique using third harmonic generation (THG) multiphoton microscopy (MPM). This method precisely maps surface topography and subsurface interfaces, offering enhanced material characterization.

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Area of Science:

Optics and Photonics
Materials Science
Microscopy

Background:

Traditional profilometry techniques face limitations in resolution and subsurface imaging.
Multiphoton microscopy offers advanced imaging capabilities but requires precise depth profiling methods.

Purpose of the Study:

To apply third harmonic generation (THG) multiphoton microscopy (MPM) for high-resolution interface profilometry.
To achieve nanometer-scale depth resolution for surface and subsurface characterization.

Main Methods:

Acquisition of z-stack images to generate THG depth response curves.
Precise peak definition of THG response curves for accurate depth measurement.
Utilizing THG signal at interfaces with differing nonlinear optical properties.

Main Results:

Demonstrated nanometer-scale depth resolution for surface profilometry.
Successfully characterized sub-surface layers and interfaces.
Achieved superior information acquisition compared to conventional profilometry.

Conclusions:

THG-MPM is a powerful technique for advanced surface and subsurface profilometry.
The method provides precise depth profiling beyond diffraction limits.
Applicable to characterization of micro-devices like MEMS and semiconductor chips.