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A Scalable Pathway for Plan-View TEM of 2D Materials and Surface Layers
Jessica L Thompson1, Kalana D Halanayake1, Li-Syuan Lu2
1Department of Chemistry, The Pennsylvania State University, University Park, PA 16802, USA.
Summary
A new 3D printing and focused ion beam (FIB) method creates high-quality plan-view specimens for atomic-resolution microscopy. This technique preserves delicate few-atom-thick layers, improving analysis of 2D materials and interfaces.
Area of Science:
- Materials Science
- Nanotechnology
- Microscopy
Background:
- Focused ion beam (FIB) microscopy is crucial for preparing samples for atomic-resolution electron microscopy.
- Traditional cross-sectional FIB preparation limits the analysis area.
- Plan-view scanning and transmission electron microscopy (S/TEM) offers valuable surface insights but faces challenges with delicate layers.
Purpose of the Study:
- To develop a scalable method for preparing high-quality plan-view S/TEM specimens.
- To overcome limitations of existing protective coating methods in FIB preparation.
- To enable atomic-resolution analysis of delicate surface layers and interfaces.
Main Methods:
- Integration of 3D printing technology with focused ion beam (FIB) microscopy.
- Development of a tunable protective coating strategy for sample preparation.
- Application of the method to prepare plan-view specimens of 2D materials like WS2 flakes.
Main Results:
- Successful production of high-quality plan-view S/TEM specimens.
- Preservation of few-atom-thick layers and delicate surface features.
- Demonstration of tunable protection for multiple sample areas.
Conclusions:
- The integrated 3D printing and FIB method offers a streamlined approach to plan-view specimen preparation.
- This technique expands access to atomic-resolution S/TEM analysis for delicate surface layers.
- The method is applicable to various sample types and geometries, enhancing materials characterization.
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