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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Published on: February 5, 2020
On-Chip Cavity Electroacoustics Using Lithium Niobate Phononic Crystal Resonators
Jun Ji1, Joseph G Thomas1, Zichen Xi1
1Virginia Tech, Bradley Department of Electric and Computer Engineering, Blacksburg, Virginia, USA.
Physical Review Letters
|June 22, 2026
Summary
We demonstrate on-chip cavity electroacoustic dynamics in lithium niobate resonators. This platform enables precise control of acoustic modes for quantum technologies and signal processing.
Area of Science:
- Quantum Acoustics
- Solid-State Physics
- Materials Science
Background:
- Mechanical systems are crucial for quantum technologies due to their long coherence times and coupling capabilities.
- Current control of gigahertz mechanical modes often uses optomechanical or piezoelectric coupling to superconducting qubits.
Purpose of the Study:
- To demonstrate on-chip cavity electroacoustic dynamics using electrically modulated phononic crystal resonators.
- To explore atomiclike transitions and control of acoustic modes via nonlinear piezoelectricity.
- To investigate applications in quantum acoustics and microwave signal processing.
Main Methods:
- Fabrication of microwave-frequency phononic crystal resonators on lithium niobate.
- Utilizing high dispersion of phononic crystals to create unevenly spaced acoustic modes.
- Applying electrical fields to modulate acoustic modes via nonlinear piezoelectricity.
- Demonstrating Autler-Townes splitting, ac Stark shift, and Rabi oscillation in two-mode systems.
- Achieving nonreciprocal frequency conversions in three-mode systems.
Main Results:
- Selective atomiclike transitions between acoustic modes were achieved.
- Maximum cooperativity of 4.18 was observed in two-mode demonstrations.
- Nonreciprocal frequency conversions with up to 20 dB isolation were demonstrated.
- Tunable nonreciprocity was achieved by adjusting the time delay between modulating pulses.
Conclusions:
- The developed cavity electroacoustic platform offers precise control over acoustic modes.
- This platform shows potential for advancements in quantum acoustics, sensing, and microwave signal processing.
- The use of nonlinear piezoelectricity in lithium niobate provides a versatile approach for electroacoustic dynamics.
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