High-Precision MEMS Resonant Pressure Sensor for Real-Time Barometric Monitoring.

Area of Science:

• Materials Science and Engineering
• Mechanical Engineering
• Electrical Engineering

Background:

• High-precision pressure measurement is critical for real-time barometric monitoring, aerospace, and industrial control.
• Existing sensors often face limitations in accuracy, stability, and operating range.

Purpose of the Study:

• To develop and characterize a high-accuracy Micro-Electro-Mechanical Systems (MEMS) resonant pressure sensor.
• To demonstrate the sensor's performance in terms of accuracy, stability, and repeatability.
• To evaluate the sensor's potential for practical engineering applications.

Main Methods:

• Utilized a symmetric double-ended fixed-finger comb-drive resonator structure.
• Employed electrostatic excitation to drive the resonator into stable vibration.
• Integrated piezoresistors for transduction of mechanical vibration into frequency output.
• Conducted experimental validation across a defined pressure and temperature range.

Main Results:

• Achieved an accuracy of 0.009% Full Scale (FS) over a 0-350 kPa range.
• Demonstrated excellent measurement stability with repeatability error below 0.008% FS at room temperature.
• Operated effectively across a temperature span from -30 °C to 50 °C.
• Real-time atmospheric pressure monitoring yielded a mean absolute percentage error of less than 0.05%.

Conclusions:

• The developed MEMS resonant pressure sensor offers high accuracy and stability.
• The sensor exhibits significant potential for practical deployment in critical applications.
• This work presents an effective technique for advanced resonant pressure sensing.