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Nitrogenation of microscopic MoS2 surfaces by oxidation scanning probe lithography
Saeed Sovizi1, Marcin Pisarek2, Robert Szoszkiewicz1
1Faculty of Chemistry, Biological and Chemical Research Centre, University of Warsaw, Żwirki i Wigury 101, 02-089 Warsaw, Poland.
The Journal of Chemical Physics
|July 1, 2026
Summary
Oxidation scanning probe lithography (o-SPL) can directly nitrogenize molybdenum disulfide (MoS2) crystals under ambient conditions. High voltage o-SPL incorporates oxygen and nitrogen, replacing sulfur, while low voltage causes desulfurization.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Molybdenum disulfide (MoS2) exhibits unique properties valuable in optoelectronics, energy harvesting, and catalysis.
- Material properties of MoS2 can be modulated through thermal oxidation and plasma treatments.
- Direct functionalization of MoS2 under ambient conditions is desirable for scalable applications.
Purpose of the Study:
- To investigate the capability of oxidation scanning probe lithography (o-SPL) for direct nitrogenation of MoS2.
- To explore the effects of varying input voltages during o-SPL on MoS2 modification.
- To characterize the chemical and topographical changes induced by o-SPL on MoS2.
Main Methods:
- Utilized oxidation scanning probe lithography (o-SPL) under ambient conditions.
- Employed Kelvin probe force microscopy (KPFM) for surface potential analysis.
- Applied Auger electron spectroscopy (AES) for elemental composition analysis.
- Investigated MoS2 samples with and without pre-oxidation treatments.
Main Results:
- High input voltage o-SPL simultaneously oxidized and nitrogenized MoS2, incorporating O and N atoms by replacing S atoms.
- High voltage o-SPL induced significant surface topographical changes, primarily due to sample delamination.
- Low input voltage o-SPL resulted in topographical changes associated with desulfurization, without oxidation or nitrogenation.
- Pre-oxidized MoS2 samples subjected to high voltage o-SPL showed nitrogenation alongside oxidation.
Conclusions:
- o-SPL is a viable technique for direct nitrogenation and oxidation of MoS2 under ambient conditions.
- The extent of MoS2 modification (nitrogenation, oxidation, desulfurization) is controllable via input voltage.
- o-SPL offers a pathway for tuning MoS2 properties for advanced material applications.

