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Related Concept Videos

Pressure Gauges01:20

Pressure Gauges

Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...

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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
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A Composite Layered Piezoelectric Pressure Sensor for Dynamic Monitoring with Enhanced Sensitivity and Temperature

Suyue Liu1, Dazhao Zhou2, Jinghua Lin1

  • 1School of Information Science and Engineering, Shandong University, Qingdao 266237, China.

Sensors (Basel, Switzerland)
|July 15, 2026
PubMed
Summary

This study introduces a novel piezoelectric pressure sensor with high sensitivity across a wide 0-10 MPa range. Optimized for dynamic monitoring, it offers stable performance up to 150°C and fast response times.

Keywords:
composite layered structuredynamic pressure monitoringpiezoelectric pressure sensorstructural optimizationtemperature stability

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Mechanical Engineering

Background:

  • Piezoelectric sensors for dynamic monitoring often exhibit a trade-off between charge output and measurement range.
  • Existing high-sensitivity designs are typically limited to narrow operational ranges.

Purpose of the Study:

  • To develop a composite layered piezoelectric pressure sensor overcoming the sensitivity-range limitations.
  • To optimize sensor design parameters for a 10 MPa full-scale stress constraint.

Main Methods:

  • A composite sensor design featuring a 316L stainless-steel diaphragm and a PZT-5H wafer was fabricated.
  • Wafer thickness and cavity radius were optimized.
  • Quasi-static calibration and shock-tube testing were performed to evaluate performance.

Main Results:

  • A highly repeatable quadratic pressure-charge relationship (R2=0.99995) was observed over 0-10 MPa.
  • Pressure-dependent secant sensitivity increased from 3.16 pC/kPa at 1 MPa to 5.36 pC/kPa at 10 MPa.
  • Output deviation was within 3% from 25°C to 150°C, with a resonance of ~50 kHz and a 10.12 μs leading-edge interval.

Conclusions:

  • The developed sensor demonstrates high charge sensitivity over a wide pressure range (0-10 MPa).
  • It exhibits a fast transient response and stable operation up to 150°C.
  • The sensor is suitable for dynamic pressure-pulsation monitoring in fluid-power and thermal/power systems.