A Composite Layered Piezoelectric Pressure Sensor for Dynamic Monitoring with Enhanced Sensitivity and Temperature...

Piezoelectric pressure sensors for dynamic monitoring face a trade-off between charge output and measurement range, and existing high-sensitivity designs are largely confined to narrow ranges. This study presents a composite layered piezoelectric pressure sensor in which a 316L stainless-steel diaphragm drives a centrally suspended PZT-5H wafer supported by a perforated alumina gasket, with the wafer thickness and cavity radius optimized under a 10 MPa full-scale stress constraint. Over 0-10 MPa, quasi-static calibration gave a highly repeatable quadratic pressure-charge relationship (R2=0.99995) with a maximum residual below 1% FS. The sensitivity is pressure-dependent: the secant sensitivity increased monotonically from 3.16 pC/kPa at 1 MPa to 5.36 pC/kPa at 10 MPa, reflecting a stress-stiffening response rather than a measurement tolerance band. The output deviation remained within 3% from 25 °C to 150 °C. Shock-tube testing yielded a resonance of ∼50 kHz and a mutually consistent 10-90% leading-edge interval of 10.12 μs. Combining high charge sensitivity over a wide 0-10 MPa range with a fast transient response and stable operation up to 150 °C, the proposed sensor is suited to dynamic pressure-pulsation monitoring in fluid-power and thermal and power-plant fluid systems.